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Application steps of vacuum evaporation coating machine

1. Turn on the water pump and air source of multi arc ion coater.

2. Turn on the main power supply.

3. Turn on the power supply of the holding pump and the vacuum gauge, the position of the vacuum gauge is V1, wait until its value is less than 10, and then enter the next operation. It takes about 5 minutes.

4. Turn on the mechanical pump and pre pumping, turn on the power supply and start of the turbomolecular pump, change the vacuum gauge switch to V2 direction, and pump until it is less than 2, which takes about 20 minutes.

5. Investigate that after the reading of turbomolecular pump of sputter sputtering coater reaches 250, turn off the pumping, turn on the front machine and high valve to continue vacuumizing, and turn on the high vacuum meter on the right to investigate the vacuum degree after the vacuumizing reaches a certain degree. Vacuum reaches 2 × 10-3 power on the electron gun in the future.